idonus.com.cn
Idonus - innovations for microsystem fabrication
editIdonus is producing a Hydro Fluoric Vapor Phase Etching HF VPE apparatus for sticking free silicon dioxide etching in micro fabrication
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idonus - innovations for microsystem fabrication
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idonus vapour phase etching vapor phase etching MEMS sticking free release sticking free hotplate electrostatic chuck hf hydro fluoric hydrofluoric hydro fluoric acidglass etching etching SiO2 chemical handling solutions critical point drying infrared microscope irm wafer bonding inspection wbi wet process wafer chuck mask aligner shadow mask aligner alignment bonding nanoimprint double image microscope
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Idonus is producing a Hydro Fluoric Vapor Phase Etching HF VPE apparatus for sticking free silicon dioxide etching in micro fabrication
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